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SPM Glossary
IC-AFM
Intermittent Contact AFMThe intermittent-contact mode is also sometimes known as the high-amplitude resonance mode, high definition mode, quasi-noncontact mode or tapping mode.
Nanotechnology 8, 67 (1997).
IET
Inelastic Electron TunnelingPhys.Rev. Lett.V. 86, №12,p. 2593 (2001).
IFM
Interfacial Force MicroscopyRev. Sci. Instr. 68, 4124 (1997).
Image Log Slope
The slope of the logarithm of the aerial image at the nominal line edge. IRSE
Infrared spectroscopic ellipsometry ITRS
International Technology Roadmap for Semiconductors
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