SPM Glossary

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IC-AFM

Intermittent Contact AFM
The intermittent-contact mode is also sometimes known as the high-amplitude resonance mode, high definition mode, quasi-noncontact mode or tapping mode.
Nanotechnology 8, 67 (1997).

IET

Inelastic Electron Tunneling
Phys.Rev. Lett.V. 86, №12,p. 2593 (2001).

IFM

Interfacial Force Microscopy
Rev. Sci. Instr. 68, 4124 (1997).

Image Log Slope

The slope of the logarithm of the aerial image at the nominal line edge.

IRSE

Infrared spectroscopic ellipsometry

ITRS

International Technology Roadmap for Semiconductors