SPM Glossary
RCSE
rotating compensator spectroscopic ellipsometer technology
RC SFM
Resonance contact scanning force microscope
The resonance contact scanning force microscope includes a reflective cantilever arm which is oscillated at a high harmonic of the resonance frequency of the cantilever arm, while the probe tip is maintained in substantially constant contact with the surface of the specimen. The motion of the free end of the cantilever arm is measured, to generate a deflection signal indicative of the amount of actual deflection of the probe tip. The method and apparatus permit high speed scans and real time imaging of the surface of a specimen with a substantial reduction in noise normally arising due to tip-surface interaction and acoustic noise.
US Pat. 5481908
Repeatability
Repeatability
“The closeness of the agreement between the results of successive measurements of the same
measurand carried out under the same conditions of measurement” [1].
These conditions are called the repeatability conditions. Repeatability conditions include the
following:
– The same measurement procedure
– The same observer
– The same measuring instrument used under the same conditions
– The same location
– Repetition over a short period of time
Repeatability may be expressed quantitatively in terms of the dispersion characteristics of the
results.
[1] International Organization for Standardization, International Vocabulary of Basic and
General Terms in Metrology–ISO, 60P, Geneva, Switzerland, ISBN 92-67-01075-1, 1993.
Reproducibility
“The closeness of the agreement between the results of measurements of the same measurand
carried out under changed conditions of measurement.” [1].
A valid statement of reproducibility requires the specification of the conditions changed. These
changes may include the following:
– Principle of measurement
– Method of measurement
– Observer
– Measuring instrument
– Reference standard
– Location
– Conditions of use
– Passage of time
Reproducibility may be expressed quantitatively in terms of the dispersion characteristics of the
results. The results are usually understood to be corrected results.
Reproducibility includes those effects associated
with the variability of measurements made under identical conditions, i.e., repeatability.
[1] International Organization for Standardization, International Vocabulary of Basic and
General Terms in Metrology–ISO, 60P, Geneva, Switzerland, ISBN 92-67-01075-1, 1993.
resonant tapping-force microscopy
Physical Review B 54, 8908 (1996).
RET
resolution enhancement technology
RIE
reactive ion etching
RNCM
Resonant Non-Contact Mode
Phys. Rev. Lett. 82, 3388
RRTM AFM
Repulsive Regime in TM AFM
In the repulsive regime of Tapping-Mode operated AFM, a net repulsive force dominates the amplitude reduction.
Physical Review B 60, 4961
RSFQ
RSFQ
Rapid Single-Flux-Quantum
RTFM
Resonant Tapping-Force Microscopy
See Tapping-Mode AFM
Phys. Rev. B 54, 8908 (1996).
RTM
Resonance Tracking Mode
Appl. Phys. Lett. 78, 1939 (2001).
