Contact EFM

As in Noncontact EFM in Contact EFM the cantilever is biased directly by V_tip=V_dc + V_ac sin(wt), where V_ac is referred to as the driving voltage. Scanning is executed as in usual Constant Force mode  and simultaneously the electric forces are measured. The capacitive force F_cap(z) between the tip and a surface at potential V_s is

F_cap(z) =(1/2) (V_tip - V_s)²(dC/dz)

where C(z) is the tip-surface capacitance dependent on tip geometry, surface topography and tip-surface separation z. 
In contact EFM the influence of the first harmonic of F_cap(z) on the cantilever oscillation is registered. 
Contact EFM can be applied to semiconductor structures. The current flow through the contact area may decrease those forces, but it is extremely small, since there are usually thick (a few nanometers) oxide layers on the tip and sample surface.
As an example data of GaAlAs geterostructures measuring are given. 

     References

Rev. Sci. Instr. 70, 1735 (1999).

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